The following items are required by the supplier: 1.1. Turbo pumps and accessories that will be connected to a separate custom vacuum chamber 1.2. One multi-stage root pump 1.3. Two turbomolecular pumps 1.4. Two throttling valves to be mounted in front of the turbomolecular pumps 1.5. The components should be able to operate independently with an option of being fully integrable. 1.6. Datasheet and/or operational manual should be provided. 1.7. Reducer flanges from DN 250-DN 40 for the combination of the specified components should be quoted, including pump controllers and pressure gauges. 1.8. The pumps and accessories should be able to operate efficiently with H2, D2, N2 and He gas. 1.9. The pumps and its accessories should adhere to technical details, as listed in section 2 - 7...
