Specifications include, but are not limited to: Linear Stage Movement (XYZ Micrometer Stage) 1) Z-Motion a) Travel Range: 12.7 mm b) Travel Speed: 0-2 mm/s c) Uni-directional Repeatability: ±0.08 µm (typ.); ± 0.25µm (guaranteed) d) Bi-directional Repeatability: ±0.13 µm (typ.); ± 75µm (guaranteed) e) Accuracy: ±2.0 µm (typ.); ±4.0 µm (guaranteed) f) Resolution: 0.1 µm 2) XY Motion a) Travel Range: 12.7 mm b) Angular deviation: < 100 µrad c) Actuation: Vernier Micrometer Linear Stage Movement (Piezoelectric Motor) a.) Travel Range: 100 µm b.) Travel Speed: 0-1500µm/s c.) Uni-directional Repeatability: ±0.10 nm (guaranteed) d.) Bi-directional Repeatability: ±0.10 nm (guaranteed) e.) Resolution: 36 nm f.) Operating Temperature: -20°C – 80 °C 1) Z-Motion a) Travel Range: 50 mm b) Travel Speed: 0-3.0 mm/s c) Uni-directional Repeatability: ±10 µm (guaranteed) d) Bi-directional Repeatability: ±50 µm (guaranteed) e) Accuracy: ±30 µm (guaranteed) f) Resolution: 0.8 nm g) Operating Temperature: -20 – 40°C 2) XY Motion a) Travel Range: 50 mm b) Travel Speed: 0-5 mm/s c) Uni-directional Repeatability: ±0.10 µm (typ.); ± 0.25µm (guaranteed) d) Bi-directional Repeatability: ±0.30 µm (typ.); ± 1µm (guaranteed) e) Accuracy: ±2.2 µm (typ.); ±5.0 µm (guaranteed) f) Resolution: 0.1 µm Optical Components (DLP) 1.) DMD Chipset: 1024 x 768 2.) Pixel Size: 5 mm x 5 mm (5X, Mitutoyo Objective); 1.25 mm x 1.25 mm (20x, Mitutoyo Objective) 3.) Projection Area: 5.12 x 3.84 mm (5x Objective); 1.28 x 0.96 mm (20 x Objective) 4.) Objective Lens: 5X Mitutoyo Plan Apo Infinity Corrected Long WD or 20X Mitutoyo Plan Apo Infinity Corrected Long WD 5.) LED Configuration: 405 nm and 532 nm LED’s 6.) Light Intensity: > 300 mW/cm2 (405 nm and 532 nm) 7.) Intensity Uniformity: 90% over full projection area 8.) Targeting Camera: 4000 x 3000 px, 31 fps, CMOS