Specifications include, but are not limited to: renovation of up to 391,780 GSF at the Montopolis Research Center; it will update, refresh, and enhance the physical infrastructure, and will convert some space for cleanroom use – all of this is being done to support state-of-the-art microelectronics process tools. This project will also equip this renovated facility with leading-edge tools for heterogeneous integration R&D.; Inside the cleanroom, ISO 5 and ISO 6 space will be repurposed into ISO 4 space, increasing the process-oriented utilization; floor to ceiling height will be raised by lowering modular floors and/or raising the ultra-low particulate air (ULPA) grid to allow for larger equipment to be installed. Walls and air plenum boxes that connect to the HVAC system to bring in, distribute, and remove air will also be adjusted. Process characterization is critical to rapid development, including the need to expand or improve light lab space on the Montopolis campus; this may include conversion of some light lab space to ISO 6 or ISO 7 cleanroom space.
