Specifications include, but are not limited to: The Project includes the installation and site preparation for (5) semiconductor processing tools and ancillary support equipment that includes process pumps and chillers, process gas abatement unit, process cooling water (PCW) system, and gas cabinets and gas panels to support the processing tools. A. Provide temporary partitions and ceilings as indicated to separate work areas from Owneroccupied areas, to prevent penetration of dust and moisture into Owner-occupied areas, and to prevent damage to existing materials and equipment. B. Construction: Framing and reinforced polyethylene sheet materials with closed joints and sealed edges at intersections with existing surfaces: A. Provide security and facilities to protect Work, existing facilities, and Owner's operations from unauthorized entry, vandalism, or theft. B. ADA routes must be provided and maintained at all times from the site & adjacent buildings.
