***** Amendment 1
This amendment is intended to answer questions that have been asked. Along with the answers to questions, the response date has also been extended from May 9, 2025 to May 14m 2025.
Q&A
Question 1: Chuck temperature –
Ultra-dry environment – a 1ppm H20 measurement equates to a -76C dew point, which we accomplish with our CDA and a chuck temperature that has a -60C temperature. Can you confirm if any testing will be done at negative temperatures or just ambient to 200C?
Answer 1: Tests will only be conducted from ambient to 200 C. It does not matter to us what temperature the chuck is at during the drying phase, provided that we can transfer the wafer from a staging area within the chamber to the chuck at ambient or above.
Question 2: Wafer handling
For the sample staging area and 8 hours to reach ultra-dry conditions from ambient and allow samples to be loaded…
Wafer exchange can be accomplished with our normal rollout chuck, but the process of opening the chamber and changing wafers will require time to reach the dew point.
An automatic exchange into a maintained low dewpoint can only be accomplished with a fully automatic probe stations with a 25 wafer cassette and our material handling unit (MHU).
Please confirm semi-automatic vs. automatic probing with regard to changing wafers.
Answer 2: The probing station should be semi-automatic. The 8 hours references the time from closing the chamber (with sample(s) inside) to reaching a <1ppm H2O environment. If 8 hours is not possible, please ask them to provide an estimated time that they can achieve.
End of Amendment 1 *****
Please see attached solicitation document for full details.
Please note that this is 100% set-aside for small business.
