Specifications include, but are not limited to: The research focus of the project is to create very small (<100 nm) electronic and optoelectronic devices for space applications. Plasma cleaner is used in the process of making electronic and optoelectronic devices. The instrument is an essential part of the process. The system UND would want to purchase should meet the following minimum criteria or deemed acceptable by UND: 1- Quartz chamber taking wafers up to 4” 2- PC/PLC control with touch screen 3- Ethernet/networking cable 4- Control software with unlimited number of recipes 5- Chamber viewport 6- High conductance vacuum port and isolation valve 7- Quartz boats capability 8- Cooled plate 9- Flow and cooling capability 10- 1000-Watt, air cooled, 2.45 GHz microwave power supply 11- Minimum three gas lines 12- Three steel mass flow controllers, 500 scc/m. Configurable for specific gas types. 13- Dry pump with silencer and connections 14- Quartz, chamber length shelf, sample holder 15- Automatic pressure control with capacitance monometer
