Please note: This is a Sole Source Notification.. Montana State University Procurement & Contract Services is considering a request from the Montana Microfabrication Facility, to award a Sole Source purchase to Keyence Corp of America for a non-contact, high-resolution optical metrology system to support inspection and characterization of microfabricated and photonic devices including photonic integrated circuits (PICs), waveguides, etched substrates, thin films, and full wafers. Total Contract Value is estimated at $185,000.00. The determination of this Sole Source purchase is based on the following requirements: The required metrology system must be capable of: Measuring chip bow, etch depth, surface roughness, and film thickness Must be able to waveguide etch heights with widths of ~1 um Must have z resolution of ~1 nm with laser scanning microscopy and <0.1 nm with white light interferometry Must have xy resolution of <250 nm 150x lens objective for ultrahigh magnification in xy Low magnification ring lighting for ease of finding locations of interest on a large surface 16-bit photomultiplier for the laser confocal for improved sensitivity for z mapping Measuring surfaces with widely varying reflectivity and roughness We measure transparent films, opaque films, smooth films, rough surfaces Measuring surfaces at large angles off normal to accommodate steep features and complex surface geometries
