Argonne National Laboratory is seeking to source:
1qty Wafer spinner that can spin photoresist and other polymers
- splash ring
- speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round
- Bowl Cover made of safety glass
- Process bowl of polypropylene (removable)
- d- igital vacuum gauge
- vacuum monitoring
- cover open interlock
- 115VAC 60/50hz 5/3 single phase
- Acceleration 4000 rpm/sec
- spinning time 1s-999s
- 200 recipes with 40 steps each
- waste bottle (0.5l in front of spinner)
- Exhaust connection PG11 tube
- Dimension: (wxdxh) cannot exceed (350x446x430mm)
- directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line
- spin chucks for : 150mm, 100mm, 3", 2" - with centering rings
- piece chuck with 3mm diameter vacuum area
- spare bowl
- spare waste bottle
- options for future dispense and edge bead upgrades
Please see attached solicitation package - on the ANL-70 form: Please remember to complete points A-F on page 3.
NO SOLICITATION WILL BE CONSIDERED WITHOUT ALL THESE COMPLETED. If any components are missing, your solicitation will be discarded.
All forms and signed solicitation have a requested completion date of 8/13/25 at 12PM CST. If there are any questions please feel free to reach out to awegrzyn@anl.gov.
