Specifications: 5.2.1 The proposed tool should offer the capability to take profile measurements on a wide range of substrate sizes, from small irregular shaped pieces up to 300mm wafers. 5.2.2 The proposed tool should provide analysis software capable of constructing 2D surface profiles for large areas of the substrate 5.2.3 Substrate holder should be able to accommodate small, odd shaped pieces up to 300mm wafers. 5.2.4 The proposed tool should be able to calculate film stress measurements from measured data 5.2.5 The proposed tool should come with its own vibration reducing hardware and table. 5.2.6 The proposed tool should come with NIST traceable standards that span the range of the tool’s capabilities 5.2.7 Inclusion of a consumables kit is preferred. 5.2.8 The tool should come with a warranty. The length and coverage will be part of review. 5.2.9 The tool should come with shipping, installation, start-up and training
