5.2.1 Price 5.2.2 4K resolution 5.2.3 20x-6kX mag 5.2.4 integrated stage camera for sample placement and focusing, controllable via software or manually 5.2.5 Dual camera 5.2.6 Brightfield/darkfield/transmitted/polarized/DIC light settings 5.2.7 180 deg rotation and 250 deg tilt sample positioning relative to objectives 5.2.8 XY stage movement to accommodate 300mm wafers 5.2.9 Laser based Elemental analysis capable of multi-layer analysis in atmosphere, with NIST database comparison 5.2.10 Capable of both liquid and solid elemental detection 5.2.11 Ability to quantify grain size 5.2.12 Ability to recognize defects and particles 5.2.13 Automated, multi-die measurements and image capture 5.2.14 XY stitching with 1-micron stage positioning 5.2.15 Consumables kit 5.2.16 Shipping, Training and Installation
