Specifications include, but are not limited to: Wavelength range: The instrument should cover a spectral range of 245 – 1690 nm with a minimum of 660 wavelengths using a combination of quartz tungsten halogen and deuterium light sources (or similar light source technologies) Measurement spot size/focusing optics: The instrument standard spot size, as defined by the light beam diameter, should range from 2 mm – 5 mm but should also be equipped with focusing optics that enable spot size diameters down to 300 μm or better. Focusing optics should be modular enabling easy installation/removal. Goniometer: The instrument must be equipped with a computer/software controlled automated goniometer with variable angle of incidence ranging from 45° to 90° angle of incidence. An angular resolution of at least 0.005° is required. Standard sample mounting stage must be in a horizontal configuration and should accommodate samples up to 18 mm in thickness and 300 mm in diameter. Detection: The instrument should be capable of parallel detection and simultaneous measurement of all specified wavelengths preferably using CCD array technology for fast spectroscopic measurements. Pixel resolutions for the CCD array should be at least 1.6 nm for wavelengths < 1000 nm and at least 3.4 nm for wavelengths > 1000 nm. Performance: The instrument should enable fast (data acquisition time should range from 50 ms – 5000 ms) and accurate full range determination of Psi (Ψ) and Delta (Δ) values (0° – 90° for Psi and 0° – 360° for Delta) for measurements of general ellipsometry, % depolarization, and Mueller Matrix elements. Minimum performance must be met by 95% of the covered wavelengths when measured in straight‐through empty beam (air) configuration: Accuracy: Ψ = 45° ± 0.075 and Δ = 0° ± 0.05; tan(Ψ) = 1 ± 0.0013 and cos(Δ) = 1 ± 0.0000015. Repeatability: δΨ = 0.015° δΔ = 0.015°.