Specifications include, but are not limited to: Item 1: Arradiance GEMStar XT-SR Single Manifold Thermal / PEALD Ready Benchtop System (or equivalent): Thermal ALD deposition of oxides, nitrides, etc. temperature up to 300C; Ability to process multiple wafers in one run; Ability/interface to be upgraded to Plasma-Enhanced (PE-ALD); At least 1-year manufacturer warranty. Including at a minimum: 1 - 2 zone 1500 W Reactor Chamber 1 - ALD Material Distribution Manifold 2 - Moveable Up to 175C Material Heat Zones 2- 150ml DOT Certified ALD Precursor Bottles 1 – External Interface with Ball Valve 1 – 120V/20A/60Hz USB Control Module 1 – Windows Computer Package Item 2: ARR-40591B-DOT 4B 150ML Bottle w/ 175C Bellows Valve (or equivalent) Item 3: ARR-850880 XT Glovebox Interface (or equivalent) Item 4: ARR-40800 Pump Package (or equivalent)